Glossary

AFM

Atomic Force Microscope

ALD

Atomic Layer Deposition

BCP

Block CoPolymer

CCD

Coupled Charge Device

CMOS

Complementary Metal Oxide Semiconductor

Comsol

Finite Element Modelling software for multiphysics simulation

FEM

Finite Element Modelling

HFM

Heterodyne Force Microscopy

MEMS

Micro-ElectroMechanical System

NIL

NanoImprint Lithography

OEM

Original Equipment Manufacturer

PTMS

Photo Thermal Micro Spectroscopy

SEM

Scanning Electron Microscopy

SFM

Scanning Force Microscopy

SME

Small or Medium-size Enterprise

SP

Sub-Project

SPM

Scanning Probe Microscopy

SThM

Scanning Thermal Microscope

STM

Scanning Tunneling Microscope

TIM

Thermal Interface Material

T-NIL

Thermal NanoImprint Lithography

UFM

Ultrasonic Force Microscopy

UV

Ultraviolet

UV-NIL

Ultraviolet NanoImprint Lithography

3-omega method